Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1994-10-04
1996-06-25
Smith, Matthew S.
Photocopying
Projection printing and copying cameras
Step and repeat
G03B 2742
Patent
active
055305164
ABSTRACT:
Scanning microlithography apparatus for effecting exposures of substrates to radiation sources. A mask support and a substrate stage are disposed in spaced-apart positions directly opposite each other, witch a lens system between them and with a radiation source on the outer side of the mask support. The mask support and substrate stage are at a substantial angle to horizontal in order to achieve benefits including reduction in gravitation-induced sagging of the mask. A massive block of granite is provided at the substantial angle to horizontal, and has a flat face that keeps the mask support and substrate stage at desired positions relative to the radiation source and lens system, during scanning.
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Gausewitz Richard L.
Lane David A.
Smith Matthew S.
Tamarack Scientific Co. Inc.
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