Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Patent
1998-01-23
2000-05-09
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
250580, 2502141, 257 59, H01L 31115, G01T 124
Patent
active
060607149
ABSTRACT:
This invention is related to a radiation image (e.g. X-ray imager) including a thin film transistor (TFT) array, and method of making same. A photo-imageable interface barrier layer is provided between an array of collector electrodes and a photoconductor layer so as to simplify the process for manufacturing the imager and to improve image uniformity. In certain embodiments, the barrier layer is a negative resist. In certain embodiments, the barrier layer and an insulating layer over the TFTs may be of the same photo-imageable material.
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Boer Willem den
Byun Young H.
Zhong John Z. Z.
Hannaher Constantine
Israel Andrew
OIS Optical Imaging Systems, Inc.
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