Large area energy beam intensity profiler

Details Large area energy beam intensity profiler Large area energy beam intensity profiler

1998-02-04

1999-09-28

Evans, F. L.

Optics: measuring and testing

Lamp beam direction or pattern

250205, G01J 100

Patent

active

059597259

ABSTRACT:
A large area energy beam intensity profiler and method of profiling are disclosed. The profiler includes intensity detectors which generate electrical signals corresponding to the intensity of the beam. The output of the detectors is processed by a computer and displayed on a monitor. The invention provides for adjustment of the beam in response to a nonuniform intensity profile, or an indication that the beam is misaligned.

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