Lanthanum complex and process for the preparation of a BLT...

Details Lanthanum complex and process for the preparation of a BLT... Lanthanum complex and process for the preparation of a BLT...

2005-02-22

2005-02-22

Beck, Shrive P. (Department: 1762)

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

C427S255391, C427S255394

Reexamination Certificate

active

06858251

ABSTRACT:
A lanthanum complex of formula (I) having a low evaporation temperature can be used as a useful precursor for MOCVD of a BLT thin layer on semiconductor devices.wherein A is pentamethyldiethylenetriamine(PMDT) or triethoxytriethyleneamine(TETEA).

REFERENCES:
patent: 6274195 (2001-08-01), Rhee et al.

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