Coating apparatus – Control means responsive to a randomly occurring sensed... – Temperature responsive
Patent
1991-07-05
1993-03-02
Jones, W. Gary
Coating apparatus
Control means responsive to a randomly occurring sensed...
Temperature responsive
118692, 118 64, 118402, 118429, 4274301, B05C 309
Patent
active
051905914
ABSTRACT:
A Langmuir-Blodgett (LB) film forming apparatus has a packing unit for orientating and packing a sample which is a composition for forming a monomolecular film developed on a subphase stored in a first tank, a sampling unit for sampling the orientated and packed monomolecular film on a substrate, and an outer casing enclosing the packing unit and sampling unit. The packing unit has a second tank in which a circulating solution is stored and the first tank is disposed in the solution. A temperature of the circulating solution in the second tank is controlled by a first controller and a temperature of atmosphere enclosed by the casing is controlled by a second controller. The first and second controllers are synchronously operated. The substrate is disposed above the subphase in a vertical attitude. The sampling unit includes a pressure detector for detecting a pressure of the packed monomolecular film and the packing unit includes a barrier driving means which is operatively connected to the pressure detector so that the movement of the barrier stops when a detected pressure reaches a predetermined value.
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Matsui Fumio
Miyadera Toshiyuki
Okano Makoto
Burns Todd J.
Jones W. Gary
Pioneer Electronic Corporation
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