Lamp for enveloping a single isotope of a metal element and expo

Details Lamp for enveloping a single isotope of a metal element and expo Lamp for enveloping a single isotope of a metal element and expo

1991-09-12

1993-07-20

Anderson, Bruce C.

Radiant energy

Radiant energy generation and sources

2504921, 313639, G21G 400, H01J 3700

Patent

active

052296164

ABSTRACT:
In an exposure light source for use in exposing a pattern onto a substrate, an exposure lamp substantially encloses only a single isotope of a specific metal. The single isotope emits far ultraviolet light which has a very narrow bandwidth when vaporized and excited in the exposure lamp. Preferably, the single isotope may have a nuclear spin equal to zero and is effective to make the bandwidth of the far ultraviolet light narrower. The single isotope may be determined in consideration of an abundance ratio of each isotope. The specific metal may be selected from a group consisting of mercury, lead, zinc, and cadmium.

REFERENCES:
patent: 3755756 (1973-08-01), Silfvast
patent: 4379252 (1983-04-01), Work et al.
patent: 4445067 (1984-04-01), Inoue et al.
patent: 4607371 (1986-08-01), Eden et al.
patent: 4625120 (1986-11-01), Caprari
patent: 4707609 (1987-11-01), Shimamura
patent: 4900938 (1990-02-01), Suzuki et al.
patent: 5097137 (1992-03-01), Ogoh
patent: 5099557 (1992-03-01), Engelsberg

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