Lamp control system

Details Lamp control system Lamp control system

2006-05-02

2006-05-02

Vo, Tuyet Thi (Department: 2821)

Electric lamp and discharge devices: systems

With load device temperature modifier

C315S117000, C315S118000, C101S424100, C101S487000

Reexamination Certificate

active

07038390

ABSTRACT:
A method and apparatus are provided for reducing the stable lamp standby power to the order of 5% of nominal full power in order to reduce the effects of heat from the lamp on a substrate during production downtime. In particular, a power controller changes the operating voltage and current of the lamp, and controls the temperature of the lamp in order to maintain stable lamp operation at the changed voltage and current.

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