Laminating device and laminating method

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

Reexamination Certificate

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Details

C156S230000, C156S556000, C156S580000, C156S583100, C156S583300

Reexamination Certificate

active

06951593

ABSTRACT:
A laminating device10includes a vacuum grid19for holding a glass substrate12,a curved pad20,facing the glass substrate12,for holding a laminated element16of a wafer13and an adhesive tape15,and a driving element22for moving the curved pad20toward the vacuum grid19.The curved pad20has a curved surface region46so that the distance to a smooth surface region39of the vacuum grid19is gradually increased from the center C toward the outside. By the driving element22,the vacuum grid19and the curved pad20become close to each other in a substantially vacuum chamber. As a result, the glass substrate12and the laminated element16are gradually laminated to each other while removing a very small amount of air that may be present therebetween to the outside.

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