Laminating apparatus

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – Chamber enclosing work during bonding and/or assembly

Reexamination Certificate

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Details

C156S358000, C156S382000, C156S498000

Reexamination Certificate

active

10921131

ABSTRACT:
When a laminating apparatus M is constituted with a vacuum suction step S1for vacuum sucking an enclosed space in a work tray2accommodating a laminated-substrate W, a thermocompression-bonding step S2for heating and pressuring the work tray2having finished the vacuum suction step S1, and a cooling step S3for cooling the work tray2having finished the thermocompression-bonding step S2, a conveyer route R of a rectangular frame form to circulatorily convey the work tray2along a horizontal direction is provided, and in a processing conveyer section Rp composing one side of the conveyer route R, the vacuum suction step S1, the theremocompression-bonding step S2, and the cooling step S3are sequentially disposed.

REFERENCES:
patent: 5472556 (1995-12-01), Sanko
patent: 2001/0005603 (2001-06-01), Kubota
patent: 3381027 (2002-12-01), None
patent: 3381027 (2003-02-01), None
Machine Translation of JP3381027B2.

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