Laminated thin film capacitor and method for producing the same

Details Laminated thin film capacitor and method for producing the same Laminated thin film capacitor and method for producing the same

1994-03-22

1995-10-17

Walberg, Teresa J.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

3613214, 3613211, 361311, H01G 410

Patent

active

054596351

ABSTRACT:
A laminated thin film capacitor having a substrate, at least two electrode layers, at least one dielectric layer and a pair of external electrode which are placed on respective side walls of the capacitor, wherein the metal electrode layer and the dielectric layers are laminated alternately on the substrate, and every other metal electrode layers are exposed on each of side walls of the capacitor, which capacitor is excellent in dielectric properties such as a high capacity per unit volume.

REFERENCES:
patent: 3686591 (1972-08-01), Gikow
patent: 3740624 (1973-06-01), McAdams, Jr. et al.
patent: 4017885 (1977-04-01), Kendall et al.
patent: 4297773 (1981-11-01), Galvagni
patent: 4531268 (1985-07-01), Rayburn
patent: 4587041 (1986-05-01), Uedaira et al.
patent: 4661884 (1987-04-01), Seaman
patent: 5144529 (1992-09-01), Takahashi
patent: 5204314 (1993-04-01), Kirlin et al.
patent: 5326721 (1994-07-01), Summerfelt
patent: 5350606 (1994-09-01), Takada et al.
"Preparation and Properties of (Ba,Sr)TiO.sub.3 Thin Films by RF Magnetron Sputtering", Ichinose et al. Jpn. J. Appl. Phys. vol. 32, Part 1, No. 9B, pp. 4115-4117, Sep. 1993.
"Excimer laser ablated barium strontium titanate thin films for dynamic random access memory applications" Roy et al., Appl. Phys. Letters., vol. 62 No. 10, Mar. 8, 1993 pp. 1056-1058.
"A stacked capacitor with (Ba.sub.x Sv.sub.1-x)TiO.sub.3 for 256M DRAM" Koyama et al. IEDM, Dec. 1991 pp. 32.1.1-32.1.4.
"Electronic Ceramics," No. 103, pp. 57-58 (1990) (Partial English translation of p. 57, second col., line 1, to p. 58, first col. line 6).

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