Laminated structure of compound semiconductors

Metal treatment – Barrier layer stock material – p-n type – Having at least three contiguous layers of semiconductive...

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148 334, 437131, 437132, H01L 2120

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050115502

ABSTRACT:
A laminated structure of compound semiconductors comprising a IV semiconductor underlying substrate, a first III-V compound semiconductor layer that is formed as an intermediate layer on the IV compound semiconductor underlying substrate, and a second III-V compound semiconductor layer that is formed on the intermediate layer, wherein the thermal expansion coefficients of the IV compound semiconductor underlying substrate, E.sub.ts, the first III-V compound semiconductor layer, E.sub.t1, and the second III-V compound semicondductor layer, E.sub.t2, have the following relationship: E.sub.t1 >E.sub.t2 >E.sub.ts.

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