Laminated silicon oxide film capacitors and method for their pro

Details Laminated silicon oxide film capacitors and method for their pro Laminated silicon oxide film capacitors and method for their pro

1990-08-17

1992-02-11

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

29 2542, H01G 438, H01G 700

Patent

active

050880039

ABSTRACT:
A laminated silicon oxide film capacitor including a conductive or semiconductive silicon substrate and, formed on the substrate surface, at least one laminated film comprising a silicon oxide layer and an electrode layer laminated one on the other, and electrodes.

REFERENCES:
patent: 3113253 (1963-12-01), Ishikawa et al.
patent: 3149399 (1964-09-01), Sprague et al.
patent: 3259558 (1966-07-01), Matsushita
patent: 3596370 (1971-08-01), Gabrail
patent: 4464700 (1984-08-01), Stenerhag et al.
patent: 4922312 (1990-05-01), Coleman et al.

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