Laminated semiconductor sensor with vibrating element

Details Laminated semiconductor sensor with vibrating element Laminated semiconductor sensor with vibrating element

1989-05-30

1991-10-29

Woodiel, Donald O.

Measuring and testing

Dynamometers

Responsive to force

73517AV, 73702, 73778, G01L 110

Patent

active

050605267

ABSTRACT:
An electromechanical sensor is provided which comprises: a first silicon wafer which defines a resonant element; wherein the resonant element is doped with approximately the same impurity concentration as a background dopant concentration of the first wafer; and a second single crystal wafer which defines a device for coupling mechanical stress from the second wafer to the resonant element; wherein the first and second wafers are fusion bonded together.

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