Laminar flow hood with static electricity eliminator

Details Laminar flow hood with static electricity eliminator Laminar flow hood with static electricity eliminator

1987-10-01

1989-09-05

Hix, L. T.

Electricity: electrical systems and devices

Discharging or preventing accumulation of electric charge

Structurally combined with building or vehicle

361231, 361235, H05F 300

Patent

active

048644595

ABSTRACT:
A frame is placed in the flow of incident air from a laminar flow hood, and bare wires and insulated wires are stretched over the frame. A source including a transformer produces an alternating voltage. One of the outputs thereof is directly connected to the insulating wires and the other output thereof is connected to the bare wires via a capacitor. An electrode placed inside the volume of the cabinet fed with air from the hood is connected to a DC amplifier which applies a correcting voltage to the insulated wires. This apparatus turns out to be highly effective, in particular, for removing dust and neutralizing charge when manufacturing VLSI circuits.

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