Laminar flow gas curtains for lithographic applications

Details Laminar flow gas curtains for lithographic applications Laminar flow gas curtains for lithographic applications

2008-05-20

2008-05-20

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

11170067

ABSTRACT:
Laminar flow gas curtains for use in lithographic applications. In an embodiment, a gas curtain system includes a nozzle that enhances the fluidic purge process. The nozzle includes a first housing, a second housing, a flow distribution plate, and a plurality of flow conditioning channels. The first housing has an inlet for receiving a gas and encloses a first volume. The second housing encloses a second volume and is fluidly coupled to the first housing. The flow distribution plate controls the flow of gas from the first volume to the second volume. The plurality of flow conditioning channels are disposed within a portion of the second volume and are used to discharge the gas that forms the gas curtain. The length of the flow conditioning channels is selected to attenuate non-axial, gas velocity flow-vectors. The nozzle limits the gaseous mixing that occurs after the purge gas exits the nozzle channels and starts to purge a gaseous volume.

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