Laminar flow gas curtains for lithographic applications

Details Laminar flow gas curtains for lithographic applications Laminar flow gas curtains for lithographic applications

2008-05-20

2008-05-20

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000

Reexamination Certificate

active

07375791

ABSTRACT:
Laminar flow gas curtains for use in lithographic applications. In an embodiment, a gas curtain system includes a nozzle that enhances the fluidic purge process. The nozzle includes a first housing, a second housing, a flow distribution plate, and a plurality of flow conditioning channels. The first housing has an inlet for receiving a gas and encloses a first volume. The second housing encloses a second volume and is fluidly coupled to the first housing. The flow distribution plate controls the flow of gas from the first volume to the second volume. The plurality of flow conditioning channels are disposed within a portion of the second volume and are used to discharge the gas that forms the gas curtain. The length of the flow conditioning channels is selected to attenuate non-axial, gas velocity flow-vectors. The nozzle limits the gaseous mixing that occurs after the purge gas exits the nozzle channels and starts to purge a gaseous volume.

REFERENCES:
patent: 4721249 (1988-01-01), Lassiter
patent: 5559584 (1996-09-01), Miyaji et al.
patent: 5590537 (1997-01-01), Vogel
patent: 6890080 (2005-05-01), Kalley et al.
Dryden, H., “A Review of the Statistical Theory of Turbulence,” Quarterly of Applied Mathematics, vol. 1(1):7-41, Brown University, Providence, Rhode Island (1943).
Schlichting, H., “Boundary-Layer Theory,” McGraw-Hill Book Company, New York, New York, entire book (1968).
Schubauer, G.B. et al., National Advisory Committee for Aeronautics, Technical Note 2001, Aerodynamic Characteristics of Damping Screens, National Bureau of Standards (Jan. 1950).
Hatch, J. E. and Papell, S. S., “Use of a Theoretical Flow Model to Correlate Data for Film Cooling or Heating an Adiabatic Wall by Tangential Injection of Gases of Different Fluid Properties,” TN D-130, 1959, NASA.

Affiliated with

Also associated with

Rating

Laminar flow gas curtains for lithographic applications does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laminar flow gas curtains for lithographic applications, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laminar flow gas curtains for lithographic applications will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2790434