Measuring and testing – Volume or rate of flow – Proportional
Patent
1995-12-12
1997-09-30
Chilcot, Richard
Measuring and testing
Volume or rate of flow
Proportional
138 42, G01F 500
Patent
active
056728212
ABSTRACT:
A laminar flow device includes a plurality of disks and a plurality of spacers alternately stacked together. The plurality of disks are defined by first disks and second disks, each of the first disks having a hole formed through a central portion thereof, and each of the second disks having a plurality of holes formed through an outer peripheral portion thereof. The first disks and the second disks are alternately arranged with the spacer interposed between any two adjacent ones of the disks.
REFERENCES:
patent: 3504542 (1970-04-01), Blevins
patent: 3792609 (1974-02-01), Blair et al.
patent: 3851526 (1974-12-01), Drexel
patent: 4450718 (1984-05-01), Hartermink
patent: 4497202 (1985-02-01), Mermelstein
Chilcot Richard
MKS Japan Inc.
Patel Harshad
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