Lamb wave type elastic wave device

Details Lamb wave type elastic wave device Lamb wave type elastic wave device

2011-08-30

2011-08-30

Dougherty, Thomas M (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R

Reexamination Certificate

active

08008838

ABSTRACT:
Provided is a device of a high-frequency resonator using Lamb wave type elastic wave having excellent frequency temperature characteristics, the device having a significantly small frequency change, and including an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate. The cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfy any one of following expressions (Expressions 1 to 3):in-line-formulae description="In-line Formulae" end="lead"?λ=90°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 1)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?λ=210°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°  (Expression 2)in-line-formulae description="In-line Formulae" end="tail"?in-line-formulae description="In-line Formulae" end="lead"?λ=330°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°.  (Expression 3)in-line-formulae description="In-line Formulae" end="tail"?

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Nakagawa, Yasuhiko et al. “Temperature Characteristics of the Substrate for Lamb Wave Type Elastic Wave Devices”, The Transactions of the Institute of Electronics, Information and Communication Engineers C, Electronics, Jan. 1, 2006, vol. J89-C No. 1, pp. 34-39.
Yoshida, Hitoshi et al. “Propagation characteristics of substrate for Lamb wave type elastic wave devices”, Proceedings of Piezoelectric Materials & Devices Symposium, Jan. 24, 2008, vol. 2008 pp. 89-91.
Anisimkin, I.V. et al. “Temperature Sensitivity of Plate Modes in St-Quartz”, Oct. 10, 2001, vol. 1, IEEE Ultrasonics Symposium pp. 423-426.
International Search Report for PCT/JP2008/054717 dated Jun. 17, 2008.

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