Lamb wave resonator

Details Lamb wave resonator Lamb wave resonator

2011-01-11

2011-01-11

SanMartin, J. (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S31300R

Reexamination Certificate

active

07868517

ABSTRACT:
A Lamb wave resonator includes a piezoelectric layer, and a first electrode against a first face of the piezoelectric layer. The first electrode includes fingers and a contact arm, with each finger including a first side in contact with the contact arm and two other sides parallel to one another. Portions of the piezoelectric layer are at least partially etched between the two fingers to form a recess. The fingers are spaced apart from one another by a distance W calculated according to the following equation:W=n·valateralf,with⁢⁢n∈Nwhere,valateralis an acoustic propagation speed of Lamb waves,n is an order of a resonance mode of the Lamb waves,f is a resonance frequency of the Lamb wave resonator.

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