Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-06-21
2011-06-21
Budd, Mark (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S31300R, C310S31300R
Reexamination Certificate
active
07965015
ABSTRACT:
There is provided a lamb wave device with small variations in frequency, the device including: a piezoelectric thin film; an IDT electrode which is provided on a main surface of the piezoelectric thin film; and a support structure which supports a laminate of the IDT electrode and the piezoelectric thin film, and is formed with a cavity that isolates the laminate, wherein a film thickness h of the piezoelectric thin film and a pitch p of a finger of the IDT electrode are selected such that a lamb wave is excited at a target frequency, the lamb wave making dispersibility of a sonic velocity v with respect to the film thickness h of the piezoelectric thin film small.
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K. Mizutani and Kohji Toda: “Analysis of Lamb Wave Propagation Characteristics in Rotated Y-Cut X-Propagation LiNbO3Plates”, IEICE Transactions, vol. J68-A No. 5, May 1985, pp. 496-503 (with concise explanation of relevance, as authored by Applicants' Japanese representatives).
Kohji Toda and K. Mizutani: “Propagation Characteristics of Plate Waves in a Z-Cut X-Propagation LiTaO3Thin Plate”, IEICE Transactions, vol. J71-A No. 6, Jun. 1988, pp. 1225-1233 (with concise explanation of relevance, as authored by Applicants' Japanese representatives).
Ohsugi Yukihisa
Sakai Masahiro
Tai Tomoyoshi
Budd Mark
Burr & Brown
NGK Insulators Ltd.
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