Organic compounds -- part of the class 532-570 series – Organic compounds – Heterocyclic carbon compounds containing a hetero ring...
Reexamination Certificate
2006-09-12
2006-09-12
Saeed, Kamal A. (Department: 1626)
Organic compounds -- part of the class 532-570 series
Organic compounds
Heterocyclic carbon compounds containing a hetero ring...
C549S268000, C549S271000, C549S300000, C560S117000
Reexamination Certificate
active
07105684
ABSTRACT:
An object of the present invention is to provide a novel monomer compound having a lactone structure which gives polymers having more excellent feature as resist material, etc.The present invention relates to a compound represented by the following formula [1]:wherein R1and R2are an alkyl group; R3and R4are each independently hydrogen atom or an alkyl group; R5is hydrogen atom, acryloyl group or methacryloyl group; and X is a methylene group which may have an alkyl group or an ethylene group which may have an alkyl group.The present invention provides a compound having a lactone structure which gives a polymer having more excellent feature particularly as a resist material and also provides a hydroxy lactone being useful as a material, etc. therefor.
REFERENCES:
patent: 6280898 (2001-08-01), Hasegawa et al.
patent: 2001/0026901 (2001-10-01), Maeda et al.
patent: 2000-26446 (2000-01-01), None
patent: 2000/26446 (2000-01-01), None
patent: 2000-159758 (2000-06-01), None
Hori Yoji
Kenmochi Hiroyuki
Sawaki Tomoya
Corless Peter F.
Edwards Angell Palmer & & Dodge LLP
Kosack Joseph R.
O'Day Christine C.
Saeed Kamal A.
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