Kit of parts for assembling an optical element, method of...

Details Kit of parts for assembling an optical element, method of... Kit of parts for assembling an optical element, method of...

2006-05-02

2006-05-02

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S821000

Reexamination Certificate

active

07038763

ABSTRACT:
A kit of parts for assembling an optical element for use in a lithographic apparatus includes a large number of different small pieces which direct light into respective regions of the pupil plane of the radiation system and/or change the polarization state of incident radiation. The previously manufactured pieces arc selected and assembled into an optical element to rapidly create a desired intensity distribution. The optical element may also be disassembled and the pieces reused.

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