Kelvin chuck apparatus and method of manufacture

Details Kelvin chuck apparatus and method of manufacture Kelvin chuck apparatus and method of manufacture

1993-03-25

1994-04-19

Bishop, Steven C.

Chucks or sockets

Vacuum

269 21, 324158F, 29846, B25B 1100

Patent

active

053039386

ABSTRACT:
A chuck for holding semiconductor wafers during testing of circuits formed thereon has a flat mounting surface with dual electrically isolated Kelvin contacts on the surface and passages communicating between the surface and a vacuum manifold for securing the wafers on the chuck with air pressure.

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