K.sub.ip cancellation in a pendulous silicon accelerometer

Details K.sub.ip cancellation in a pendulous silicon accelerometer K.sub.ip cancellation in a pendulous silicon accelerometer

1995-11-13

1997-01-14

Noland, Thomas P.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351436, G01P 1510, G01P 1500

Patent

active

055941702

ABSTRACT:
An accelerometer, preferably made by silicon micromachining, includes a proof mass or pendulum connected to an isolator with a pair of flexures defining a hinge axis HA. The flexures enable the pendulum to rotate about the hinge axis HA relative to the isolator. In order to constrain movement of the pendulum, a pair of resonators are coupled between the pendulum and the isolator. The isolator is connected to a support by way of a pair of flexures which increases the compliance of the connection between the isolator and the support. The flexures connected between the isolator and the support have a relatively smaller cross section than the isolator and the support and, thus, reduce the transmission of stresses across the flexures. In addition, as the flexures become more compliant, the isolator deflects under acceleration which counteracts the deflection of the proof mass which results in the cross coupling error. By properly selecting the stiffness for the flexures used to connect the support and the isolator, cross coupling error can essentially be eliminated.

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