Josephson junctions and process for making same

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Tunneling through region of reduced conductivity

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257 31, 257 32, 257 35, 257 36, H01L 3922

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active

058215573

ABSTRACT:
A Josephson junction includes a substrate, a first superconducting layer, a second superconducting layer transversely overlaid on the first layer with an insulating layer interposed therebetween, the insulating layer is an oxide or a nitride of the superconducting material, and the insulating layer including a low oxygen- or nitrogen-concentrated area in contact with each of the first and second layers. A process for fabricating the Josephson junction includes the steps of preparing a substrate, forming a first superconducting layer, forming a second superconducting layer transversely on the first layer with an insulating layer interposed therebetween wherein the insulating layer is an oxide or nitride of the superconducting material, and injecting ion beams into the insulating layer so as to form low oxygen- or nitrogen-concentrated area linking the first and second layers.

REFERENCES:
patent: 4224630 (1980-09-01), Kroger
patent: 4412902 (1983-11-01), Michikami et al.
patent: 4430790 (1984-02-01), Ohta
patent: 4490901 (1985-01-01), Clark et al.
patent: 4751563 (1988-06-01), Laibowitz et al.
patent: 5100694 (1992-03-01), Hunt et al.

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