Superconductor technology: apparatus – material – process – Processes of producing or treating high temperature... – Producing josephson junction – per se
Patent
1993-05-17
1995-05-02
Dang, Thi
Superconductor technology: apparatus, material, process
Processes of producing or treating high temperature...
Producing josephson junction, per se
505410, 505413, 505702, 505728, 216 41, 216 3, H01L 2100
Patent
active
054119375
ABSTRACT:
A novel method for fabricating nanometer geometry electronic devices is described. Such Josephson junctions can be accurately and reproducibly manufactured employing photolithographic and direct write electron beam lithography techniques in combination with aqueous etchants. In particular, a method is described for manufacturing planar Josephson junctions from high temperature superconducting material.
REFERENCES:
patent: 4985117 (1991-01-01), Kurosawa et al.
patent: 4997522 (1991-03-01), Shokoohi
patent: 5016128 (1991-05-01), DiIorio et al.
patent: 5034374 (1991-07-01), Awaji et al.
patent: 5041415 (1991-08-01), Frenkel et al.
patent: 5057491 (1991-10-01), Houseley
patent: 5109164 (1992-04-01), Matsui
patent: 5350739 (1994-09-01), Martens et al.
K. P. Daly, et al, "Substrate Step-Edge YBa.sub.2 Cu.sub.3 O.sub.7 rfSQUIDS," Appl. Phys. Lett. 58 (5), pp. 543-545, Feb. 4, 1991.
K. Char et al, "Bi-epitaxial Grain Boundary Juntions in YBa.sub.2 Cu.sub.3 O.sub.7," Appl. Phys. Lett. 59 (6), pp. 733-735, Aug. 5, 1991.
Carol I. H. Ashby et al, "Improved Aqueous Etchant for High T.sub.c Superconductor Materials," Appl. Phys. Lett. 60 (17), pp. 2147-2149, Apr. 27, 1992.
J. R. Wendt et al, "YBa.sub.2 Cu.sub.3 O.sub.7 Nanobridges Fabricated by Direct-Write Electron Beam Lithography," Appl. Phys. Lett., 61 (13) pp. 1597-1599, Sep. 28, 1992.
J. S. Martens et al, "High Temperature Superconducting Josephson Transmission Lines for Pulse and Step Sharpening," J. Applied Phys. 72 (12), pp. 5970-5974, Dec. 15, 1992.
D. Dimos, et al, "Orientation Dependence of Grain-Boundary Critical Currents in YBa.sub.2 Cu.sub.3 O.sub.7-.delta. Bicrystals," The American Physical Society, Physical Review Letters, vol. 61 (2), pp. 219-222, Jul. 11, 1988.
Z. Bao et al, "Fabrication and Measurement of Submicron Planar YBa.sub.2 Cu.sub.3 O.sub.7 Microbridge Josephson Junctions," Proceedings-IEEE Transactions on Applied Superconductivity, vol. 3 (1) pp. 2417-2420, Mar. 1993.
X. Chen et al, "Measurement of Conduction Properties of Highly Resistive Superconducting Microbridges," Proceedings-IEEE Transactions on Applied Superconductivity, vol. 3, (1), pp. 1991-1994, Mar. 1993.
C. H. Park et al, "Millimeter Wave Responses of YBCO Variable-Thickness Bridges," Proceedings-IEEE Transactions on Applied Superconductivity, vol. 3, (1) pp. 2409-2412, Mar. 1993.
Martens Jon S.
Plut Thomas A.
Wendt Joel R.
Dang Thi
Sandia Corporation
Stanley Timothy D.
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