Josephson integrated circuit having a resistance element

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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357 10, 357 65, 357 67, 357 71, 427101, 338307, H01L 3922, H01L 2912, H01L 1012, B05D 512

Patent

active

050686941

ABSTRACT:
A Josephson integrated circuit comprises a substrate formed with a Josephson device, a resistance strip of zirconium provided on the substrate, a first refractory metal layer provided on a first region of the resistance strip; a second refractory metal layer provided on a second region of the resistance strip that is separated from said first region, a first superconductor interconnection pattern provided on the substrate so as to cover the first refractory metal layer, and a second superconductor interconnection pattern separated from the first superconductor interconnection pattern and provided on the substrate so as to cover the second refractory metal layer.

REFERENCES:
patent: 3588638 (1971-06-01), Fleming
patent: 3665599 (1972-05-01), Herczog et al.
patent: 3670221 (1972-06-01), Hamamoto et al.
patent: 4035819 (1977-07-01), Nitta et al.
patent: 4209764 (1980-06-01), Merz et al.
patent: 4904980 (1990-02-01), Przybysz et al.
patent: 5021867 (1991-06-01), Przybysz

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