Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1980-02-01
1981-10-13
Edlow, Martin H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
357 4, 427 62, H01L 3922
Patent
active
042951470
ABSTRACT:
Thin film electrodes particularly suited for Josephson devices of improved thermal cyclability are prepared by depositing thin films of superconductive metal and an intermetallic compound former on a substrate held at a temperature below about 100.degree. K. and at a pressure below about 1.times.10.sup.-7 Torr so that intermetallic compound formation occurs at the grain boundaries of the metal to inhibit grain growth. The thin film electrodes are characterized by median grain size <100 nm.
REFERENCES:
patent: 3725213 (1973-04-01), Pierce
patent: 3733526 (1973-05-01), Anacher et al.
patent: 3816173 (1974-06-01), Eldridge et al.
patent: 3852795 (1974-12-01), Ames
patent: 3999203 (1976-12-01), Lahari
patent: 4012756 (1977-03-01), Chaudhari et al.
Deutscher et al., Appl. Phys. Lett., vol. 27, No. 6, Sep. 15, 1975, p. 366 et seq.
Huang Hung-Chang W.
Kircher Charles J.
Murakami Masanori
Edlow Martin H.
International Business Machines Corp.
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