Josephson devices and process for manufacturing the same

Details Josephson devices and process for manufacturing the same Josephson devices and process for manufacturing the same

1989-09-27

1991-09-10

Hille, Rolf

Superconductor technology: apparatus, material, process

High temperature , per se

Having tc greater than or equal to 150 k

505702, 505873, 505874, 357 5, 427 62, H01B 1200, H01L 3912, H01L 3922, B05D 512

Patent

active

050473905

ABSTRACT:
A Josephson device, comprising a junction formed by forming the first layer-shaped oxide superconductor thin film including a plurality of Cu-O layers on a substrate, a barrier layer thereon and the second layer-shaped oxide superconductor thin film on the barrier layer. The Josephson device according to the present invention is manufactured by forming the first layer-shaped oxide superconductor thin film on a substrate, forming a barrier layer in the same vacuum chamber, defining patterns to said barrier layer and said first layer-shaped oxide superconductor thin film, forming an interlayer insulating film on said barrier layer, removing said interlayer insulating film in a region serving as a junction, effecting exposure to oxygen plasma, forming the second layer-shaped oxide superconductor thin film in contact with a part of the surface of said barrier layer and defining patterns to said second layer-shaped oxide superconductor thin film.

REFERENCES:
patent: 4499119 (1985-02-01), Smith
"Y-Ba-Cu-O/Nb Tunnel TGype Josephson Junctions", Inoue et al., Jap. J. of Appl. Phys, vol. 26, #9, Sep. 1987, pp. L1443-L1444.
"A New High-Tc Oxide Supeconductor Without a Rare Earth Element", Maeda et al, Jpn. J. of Appl. Phys., vol. 27, #2, Feb. 1988, pp. L209-L210.
"A Transmission Electron Microscope and Group Theoretical Study of the New Bi-Based High-Tc Superconductors and Some Closely Related Aurivillius Phases", Withers et al, Phy C; Solid State Phys, vol. 21, 1988, pp. 6067.6083.
Journal of Physics D, vol. 20, No. 10, Oct. 1987, pp. 1330-1335, London, GB; M. G. Blamire et al: "Fabrication and Properties of Supconducting Device Structures in YBa2Cu307-x Thin Films".
IEEE Transactions of Magnetics, vol. 25, No. 2, Mar. 1989, pp. 1298-1300, N.Y., U.S., & Applied Superconductivity Conference, San Francisco, Aug. 21, '88; D. B. Schwartz: "The Observation of the AC Josephson in a YBa2Cu3O7/Au/YBa2Cu3O7 Junction", p. 1298, paragraph 3.
J. G. Bednorz and K. A. Muller, Zeitschrift fur Physik B- Condensed Matter, 64, 189-193 (1986).
Z. Z. Sheng and A. M. Hermann, Nature, 332, 138-139 (1988).

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