Electrical resistors – Strain gauge type – Dynamometer type
Patent
1986-12-24
1988-08-30
Goldberg, E. A.
Electrical resistors
Strain gauge type
Dynamometer type
338 2, 338308, G01L 122
Patent
active
047680113
ABSTRACT:
A pressure detector has a cylindrical housing projecting into an atmosphere the pressure of which to be measured, a pressure chamber formed within the housing, to which is the pressure to be measured is introduced, a metallic diaphragm formed on a surface of one portion of a wall defining the pressure chamber, which deforms in accordance with changes in the pressure which is to be measured, and a strain gauge provided in the diaphragm for generating an output signal corresponding to the strain generated due to the deformation of the diaphragm. The strain gauge is composed of a diamond monocrystal plate and a diamond semiconductor film formed on the diamond monocrystal plate. On the diamond monocrystal plate are piled a titanium film, a platinum film, and a gold film, in sequence. The gold film is joined to the diaphragm by brazing.
REFERENCES:
patent: 4276535 (1981-06-01), Mitsuyu et al.
Hattori Tadashi
Hattori Yutaka
Inoguchi Kazuhiro
Ito Novuei
Goldberg E. A.
Lateef M. M.
Nippon Soken Inc.
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