Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Reexamination Certificate
1999-03-18
2001-07-31
Jones, Deborah (Department: 1775)
Stock material or miscellaneous articles
All metal or with adjacent metals
Composite; i.e., plural, adjacent, spatially distinct metal...
C228S121000, C228S123100, C228S124100, C403S272000, C428S627000, C428S629000, C428S674000, C428S472200
Reexamination Certificate
active
06268069
ABSTRACT:
BACKGROUND OF THE INVENTOIN
(1) Field of the Invention
The present invention relates to joined articles between ceramic members and other members as well as to a process for producing such joined articles.
(2) Related Art Statement
A process for directly joining substrates made of aluminum nitride sintered bodies is known. For example, in JP-A 2-124778, aluminum nitride substrates are integrated to each other through diffusion joining by heating the substrates at 1800° C. to 1900° C. JP-A 8-13280 discloses a joined body of aluminum nitride sintered bodies having relatively high strength.
Further, a process for brazing a nitride ceramic member to another nitride ceramic member or a metallic member is known. For instance, JP-A 8-277171, discloses a joined article having high corrosion resistance against a halogen-based corrosive gas such as ClF
3
or the like by joining aluminum nitride members with a brazing material composed mainly of aluminum, copper or nickel and containing an active metal such as titanium. This brazing material is difficult to be corroded with the halogen-based corrosive gas, and easily wets the surface of the aluminum nitride member.
However, a problem exists in some uses. For example, in a semi-conductor-producing apparatus for a high temperature use, the joining layer joining the ceramic member to the metallic member is exposed to atmospheres inside and outside a semiconductor-producing chamber at temperatures not lower than 500° C. The atmosphere outside the chamber is open air or an inert gas, and that the inside chamber is medium or high degree vacuum, for example, into which a halogen-based corrosive gas or ozone is fed.
For example, since an aluminum-based brazing material has a high vapor pressure in a high temperature range of not less than 500° C., it is difficult to use. Further, since a silver-based brazing material, for example, a silver-copper-titanium based alloy brazing material also has a high vapor pressure in such a high temperature range of not less than 500° C., it is volatized under high vacuum, and is likely to be oxidized upon contacting the open air to shorten the service life of the brazing material.
SUMMARY OF THE INVENTOIN
It is an object of the present invention to enable a joined article composed of a ceramic member and another member via a layer of a metallic brazing material to maintain its joined state over a long time period even if the brazing material layer is exposed to an oxidative atmosphere, a high vacuum atmosphere, etc. at high temperatures.
The present invention relates to a process for producing a joined article between a ceramic member and another member, comprising the steps of brazing the ceramic member with said another member by using a brazing material composed of 50 to 99 wt % of copper, 0.5 to 20 wt % of aluminum, 0.5 to 5 wt % of at least one kind of active metal selected from the group consisting of titanium, zirconium, hafnium, vanadium and niobium, thereby obtaining a joined body including the ceramic member, said another member and a layer of the brazing material, and heating the brazing material layer in an oxidative atmosphere.
The present invention also relates to a joined article between a ceramic member and another member, said ceramic member and said another member being joined via a layer of a brazing material, said brazing material layer being composed of 50 to 99 wt % of copper, 0.5 to 20 wt % of aluminum, 0.5 to 5 wt % of at least one kind of active metal selected from the group consisting of titanium, zirconium, hafnium, vanadium and niobium and being heated in an oxidative atmosphere.
The present invention further relates to a joined article between a ceramic member and another member, said ceramic member and said another member being joined via a layer of a brazing material, said brazing material layer being composed of 50 to 99 wt % of copper, 0.5 to 20 wt % of aluminum, 0.5 to 5 wt % of at least one kind of active metal selected from the group consisting of titanium, zirconium, hafnium, vanadium and niobium, wherein the aluminum in the brazing material is diffused toward a side of a surface of the brazing material layer, and a passivated layer is formed on the surface side of the brazing material layer through the oxidation of the aluminum diffused.
The present invention further relates to a joined article to be attached to a semiconductor-producing chamber, said joined article comprising a ceramic member, another member and a layer of a brazing material joining the ceramic member to said another member, said brazing material layer being composed of 50 to 99 wt % of copper, 0.5 to 20 wt % of aluminum, 0.5 to 5 wt % of at least one kind of active metal selected from the group consisting of titanium, zirconium, hafnium, vanadium and niobium and being heated in an oxidative atmosphere, said brazing material layer being to be exposed to an oxidative atmosphere outside said chamber as well as to an atmosphere inside said chamber having a pressure lower than that of the atmosphere outside said chamber.
These and other objects, features and advantages of the invention will be well appreciated when taken in conjunction with the attached drawings, with the understanding that some modifications, variations and changes may be easily made by the skilled person in the art to which the invention pertains.
REFERENCES:
patent: 0 422 343 A1 (1991-04-01), None
patent: 0 726 238 A2 (1996-08-01), None
patent: 2-124778 (1990-05-01), None
patent: 8-13280 (1996-01-01), None
patent: 8-277171 (1996-10-01), None
Fujii Tomoyuki
Ohashi Tsuneaki
Burr & Brown
Jones Deborah
Koehler Robert R.
NGK Insulators Ltd.
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