Job configuration for semiconductor manufacturing

Details Job configuration for semiconductor manufacturing Job configuration for semiconductor manufacturing

1992-04-23

1994-08-23

Smith, Jerry

Boots, shoes, and leggings

364578, G06F 1546

Patent

active

053413024

ABSTRACT:
An apparatus and method for configuring semiconductor jobs to achieve a desired level of set serviceability, in either probability or expectation, using a minimal number of wafers. The configuration problem is formulated as a mathematical optimization, where the serviceability level and yield losses, at chip, wafer and job levels, are explicitly considered. The problem is then reformulated by replacing the mathematically intractable service level constraints with tractable lower bounds. The reformulated mathematical optimization is efficiently solved using marginal allocation, giving good, feasible solutions to the original configuration program.

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