Jig for use in CVD and method of manufacturing jig for use in CV

Details Jig for use in CVD and method of manufacturing jig for use in CV Jig for use in CVD and method of manufacturing jig for use in CV

1997-08-04

1999-03-16

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Work support

C23C 1600

Patent

active

058824189

ABSTRACT:
It is an object to improve the corrosion resistance of a CVD jig made of quartz to prevent exfoliation of a film attached on the surface to prevent dust. The surface of a quartz CVD jig is burned with an arc plasma torch 14 so that the OH concentration in the quartz surface remains under 30 ppm.

REFERENCES:
patent: 3226254 (1965-12-01), Reuschel
patent: 4566839 (1986-01-01), Butler
patent: 5169684 (1992-12-01), Takagi
patent: 5192371 (1993-03-01), Shuto
patent: 5534074 (1996-07-01), Koons
patent: 5595604 (1997-01-01), Kobayashi

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