Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1996-12-20
1999-03-16
Turner, Archene
Stock material or miscellaneous articles
Composite
Of inorganic material
428446, 428336, 118726, 269 38, 432156, 432262, 432264, 432265, C04B 3556
Patent
active
058828079
ABSTRACT:
A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 .mu.m or larger in the outer layer of the matrix within 200 .mu.m from the interface of the SiC film and the silicon carbide matrix when observed by a scanning electron microscope at a magnification of 400 times. The jig is manufactured by producing an SiC film on the surface of a silicon carbide matrix in which silicon has been impregnated by introducing a raw material compound for producing the SiC film and forming the SiC film at a temperature from 1000.degree. C. to 1290.degree. C. under a pressure from 500 to 760 Torr in a non-oxidative atmosphere. The jig exhibits superior resistance to high temperature heating cycles and excellent high thermal shock resistance required for heat treatment in semiconductor manufacturing.
REFERENCES:
patent: 4301132 (1981-11-01), Kennedy
patent: 4564494 (1986-01-01), Gupta et al.
patent: 4597923 (1986-07-01), Kennedy
Funato Yoshio
Furukawa Koji
Kageyama Nobuo
Yamamoto Hisao
Asahi Glass Company, Ltd
Tokai Carbon Company Ltd.
Turner Archene
LandOfFree
Jig for heat treatment and process for fabricating the jig does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Jig for heat treatment and process for fabricating the jig, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Jig for heat treatment and process for fabricating the jig will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-815979