Jig for heat treatment and process for fabricating the jig

Details Jig for heat treatment and process for fabricating the jig Jig for heat treatment and process for fabricating the jig

1996-12-20

1999-03-16

Turner, Archene

Stock material or miscellaneous articles

Composite

Of inorganic material

428446, 428336, 118726, 269 38, 432156, 432262, 432264, 432265, C04B 3556

Patent

active

058828079

ABSTRACT:
A jig used for heat treatment made from an SiC-coated silicon carbide material, wherein the SiC film is coated by the CVD method on a silicon carbide matrix in which silicon has been impregnated and wherein there are no pores with a diameter of 2 .mu.m or larger in the outer layer of the matrix within 200 .mu.m from the interface of the SiC film and the silicon carbide matrix when observed by a scanning electron microscope at a magnification of 400 times. The jig is manufactured by producing an SiC film on the surface of a silicon carbide matrix in which silicon has been impregnated by introducing a raw material compound for producing the SiC film and forming the SiC film at a temperature from 1000.degree. C. to 1290.degree. C. under a pressure from 500 to 760 Torr in a non-oxidative atmosphere. The jig exhibits superior resistance to high temperature heating cycles and excellent high thermal shock resistance required for heat treatment in semiconductor manufacturing.

REFERENCES:
patent: 4301132 (1981-11-01), Kennedy
patent: 4564494 (1986-01-01), Gupta et al.
patent: 4597923 (1986-07-01), Kennedy

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