Jig for forming hard carbon film over inner surface of guide bus

Details Jig for forming hard carbon film over inner surface of guide bus Jig for forming hard carbon film over inner surface of guide bus

1997-08-15

2000-10-17

Dang, Thi

Coating apparatus

Gas or vapor deposition

With treating means

21912149, 21912152, 21912148, 219 1247, 373 10, 427451, 427452, 279 35, 279106, 279137, 279906, 82126, 82127, C23C 1600, C23C 1626

Patent

active

061315338

ABSTRACT:
A hard carbon film is formed over an inner surface of a guide bush by fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate. The auxiliary electrode is grounded through the auxiliary electrode support member, the second electrode plate, the legs, and the vacuum vessel, a gas containing carbon is introduced into the vacuum vessel after evacuating the vacuum vessel, and a plasma is produced in the vacuum vessel by supplying electric power to the guide bush through the first electrode plate from the power source.

REFERENCES:
patent: 4404878 (1983-09-01), Blanchard et al.
patent: 4410191 (1983-10-01), James
patent: 4574666 (1986-03-01), Habegger
patent: 4970364 (1990-11-01), Muller
patent: 5115702 (1992-05-01), Link
patent: 5232569 (1993-08-01), Nelson et al.
patent: 5278861 (1994-01-01), Damond et al.
patent: 5363400 (1994-11-01), Damond et al.
patent: 5436426 (1995-07-01), Nerz
patent: 5464962 (1995-11-01), Luo et al.

Affiliated with

Also associated with

Rating

Jig for forming hard carbon film over inner surface of guide bus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Jig for forming hard carbon film over inner surface of guide bus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Jig for forming hard carbon film over inner surface of guide bus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-458821