Jig for detecting position

Details Jig for detecting position Jig for detecting position

2011-08-09

2011-08-09

Dole, Timothy J (Department: 2858)

Electricity: measuring and testing

Electrostatic field

C324S658000, C324S757010, C324S690000, C355S075000, C414S222010, C414S809000

Reexamination Certificate

active

07994793

ABSTRACT:
A transfer point of a transfer arm is detected accurately and stably by using a position detecting wafer having an electrostatic capacitance sensor. A position detecting wafer S is formed in a wafer shape transferable by a transfer arm20and includes an electrostatic capacitance sensor50for detecting a relative position with respect to a reference object by detecting an electrostatic capacitance in relation with the reference object for a position detection. The electrostatic capacitance sensor50includes a detection electrode52for forming the electrostatic capacitance in relation with the reference object, and the detection electrode52is installed on a rear surface of a main body of the wafer shape. Installed on the main body is a guard electrode100covering the detecting electrode52when viewed from a front surface thereof, for blocking an electric field oriented toward the detection electrode52from the front surface.

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