Jetting method of liquid, jetting apparatus of liquid,...

Coating apparatus – Projection or spray type – Plural projectors

Reexamination Certificate

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C118S052000, C118S612000, C118S046000

Reexamination Certificate

active

07045012

ABSTRACT:
In a method and apparatus for jetting a liquid from a nozzle of a droplet jet head and applying it to a substrate, a jet amount of the liquid to any one of at least two divided regions of a coating region of the substrate is controlled to be greater than a jet amount to the other divided regions. A spin coater can be used to rotate the substrate. To divide the coating region of the substrate, the substrate can be divided into at least an inside circumferential region and an outside circumferential region positioned at predetermined distances from the center of rotation of the substrate. In this case, the jet amount to the outside region is greater than the jet amount to the inside region.

REFERENCES:
patent: 5831645 (1998-11-01), Shimoda
patent: 5935331 (1999-08-01), Naka et al.
patent: 6518056 (2003-02-01), Schembri et al.
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English Translated Abstract—JP-10166574A.
Communication from Japanese Patent Office re: counterpart application 2002-200408.
Communication from Japanese Patent Office re: counterpart application 2002-200413.
Communication from China Patent Office regarding related application.

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