Jet clean nozzle with multiple spray openings

Details Jet clean nozzle with multiple spray openings Jet clean nozzle with multiple spray openings

2006-08-22

2006-08-22

Hwu, Davis (Department: 3752)

Fluid sprinkling, spraying, and diffusing

Unitary plural outlet means

C239S549000, C239S552000, C239S553500, C239S398000, C239S399000, C239S400000, C239S406000

Reexamination Certificate

active

07093777

ABSTRACT:
A jet clean nozzle having multiple spray openings which increase the scan density of pressurized water sprayed against the surface of a semiconductor wafer. The jet clean nozzle includes a nozzle body for attachment to a nozzle adaptor that communicates with a water jet pump. Multiple spray chambers extend into the nozzle body, and a spray opening communicates with each spray chamber. In use, pressurized water is forced through the respective spray openings and ejected from the spray chambers as multiple water jets.

REFERENCES:
patent: 4302040 (1981-11-01), Lazar
patent: 5783044 (1998-07-01), Schneider et al.
patent: 6016969 (2000-01-01), Tilton et al.
patent: 6113002 (2000-09-01), Finkbeiner
patent: 6715701 (2004-04-01), Julien

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