Fishing – trapping – and vermin destroying
Patent
1990-06-29
1991-09-17
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437190, 437915, 437984, 148DIG164, 148DIG140, H01L 2144
Patent
active
050495259
ABSTRACT:
A method is provided for forming multiple layers of interconnection adjacent a planar surface. A first insulator layer is formed adjacent the selected planar surface. A first conductor layer is formed adjacent the first insulator layer. A second insulator is formed adjacent the first conductor layer. A first cavity and a second cavity are formed, each having sidewalls extending through said second insulator layer and said first conductor layer. The first cavity is formed wider than the second cavity. A third insulator layer is conformally deposited adjacent the second insulator layer, such that sidewall insulators are deposited on sidewalls of the first cavity and such that the second cavity is substantially filled with insulator. An etch is performed through the first cavity to expose a portion of the planar surface. A second conductor layer is conformally deposited adjacent third insulator layer such that second conductor layer extends through the first cavity to contact the planar surface.
REFERENCES:
patent: 4612212 (1986-09-01), Musuoka et al.
patent: 4829018 (1989-05-01), Wahlstrom
patent: 4830974 (1989-05-01), Chang et al.
patent: 4900695 (1990-02-01), Takahashi et al.
patent: 4970177 (1990-11-01), Mizushima
Chaudhuri Olik
Comfort James T.
Holtzman Laura M.
Kesterson James C.
Sharp Melvin
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