Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-08-08
2006-08-08
Pham, Hoa Q. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S124000
Reexamination Certificate
active
07088457
ABSTRACT:
Iterative algorithm methods and systems for slope or gradient-type data is presented for wavefront zonal estimation of regular and irregular pupil shapes. The methods and systems bears universal wavefront estimation matrices that are directly applicable to any pupil shape without the need to set up new matrices. The algorithm consists in first extending the sampling pupil to a larger regular square shape and second extrapolating the sampled slope data outside of the sampling pupil employing Gerchberg-type iterations. Unbiased least-squares wavefront estimation is then performed in the square domain. Results show that the RMS deviation error of the estimated wavefront from the original wavefront can be less than λ/150 after about twelve iterations and less than λ/100 (both for λ equal 632.8 nm) within as few as five iterations.
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Rolland Jannick P.
Zou Weiyao
Connolly Patrick
Law Offices of Brian S. Steinberger , P.A.
Pham Hoa Q.
Steinberger Brian S.
University of Central Florida Research Foundation Inc.
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