Isothermal capacitance transient spectroscopy method and apparat

Details Isothermal capacitance transient spectroscopy method and apparat Isothermal capacitance transient spectroscopy method and apparat

1992-05-27

1993-04-27

Harvey, Jack B.

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

324158D, 437 8, G01R 3126

Patent

active

052065987

ABSTRACT:
A method and apparatus of determining the amount of impurities in an object with isothermal capacitance transient spectroscopy (ICTS) includes maintaining the object at a constant temperature while applying a predetermined voltage pulse to the object at predetermined test locations. The capacitance is measured over a predetermined time period, and the measured capacitance is processed to determine the amount of impurities in accordance with a differential coefficient obtained by differentiating the following equation used as the ICTS spectrum: ##EQU1## wherein C is the capacitance and t is the time period.

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Lateral Dopant Profiling with 200 nm Resolution by Scanning Capacitance Microscopy, C. C. Williams et al, Applied Physics Letters, vol. 65, No. 16, Oct. 16, 1989, pp. 1662-1664.

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