Isostatic piezoresistive pressure transducer with...

Measuring and testing – Fluid pressure gauge – Electrical

Reexamination Certificate

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Reexamination Certificate

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07032456

ABSTRACT:
A pressure sensor includes a substrate having a top metallized pad formed on the top surface and a bottom metallized pad formed on the bottom surface. These pads are divided into segments for connection with piezoresistors. A sensing piezoresistor is formed on the substrate's top surface in order to respond to a pressure of interest. A reference piezoresistor is formed on the substrate's bottom surface to respond to a reference pressure. A conductive strip is joined between the two piezoresistors for conducting heat and electricity therebetween. A temperature measuring resistor can also be positioned on the substrate. The substrate and sensors can be positioned in a housing having electrical contacts in communication with the sensors for providing voltages in response to changing pressure differentials and temperatures.

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patent: 2003/0175062 (2003-09-01), Kashiwaya et al.
patent: 2004/0076531 (2004-04-01), Takeuchi et al.
patent: 2005/0160827 (2005-07-01), Zdeblick et al.
patent: 2005/0268726 (2005-12-01), Kosht et al.

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