Isolation valve for single crystal pulling apparatus

Details Isolation valve for single crystal pulling apparatus Isolation valve for single crystal pulling apparatus

1993-09-23

1994-10-18

Fox, John C.

Valves and valve actuation

With means to increase head and seat contact pressure

With positive reduction

251178, F16K 316

Patent

active

053561139

ABSTRACT:
An isolation valve for a single crystal pulling apparatus providing a good sealing performance is disclosed. The apparatus comprises a casing having two opposite valve seats, a first valve seat having a first opening communicable with the main chamber of the apparatus, a second valve seat having a second opening communicable with the pull chamber of the apparatus. The body of the isolation valve includes a first plate movable in and out of contact with the first valve seat to open and shut the first opening, a second plate movable in and out of contact with the second valve seat to open and shut the second opening, and a bellows connecting the first and second plates. The isolation valve also comprises a holder holding the first plate out of contact with the first valve seat when the first plate is opposite to the first valve seat, a passage communicable with a fluid supply and the interior of the valve body, and a controller controlling the pressure of a working fluid supplied from the fluid supply into the interior of the valve body. The controller has a first set pressure at which the first and second plates are in contact with the first and second valve seats and a second set pressure at which the first and second plates are out of contact with the first and second valve seats.

REFERENCES:
patent: 1763029 (1930-06-01), Wilson
patent: 2476711 (1943-11-01), Edwards
patent: 3717322 (1973-02-01), Bernard
patent: 4157169 (1979-06-01), Norman

Affiliated with

Also associated with

Rating

Isolation valve for single crystal pulling apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Isolation valve for single crystal pulling apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Isolation valve for single crystal pulling apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2367051