Isolation valve

Details Isolation valve Isolation valve

1983-11-03

1985-10-08

Schwartz, Larry I.

Drying and gas or vapor contact with solids

Apparatus

Rotary drums or receptacles

34242, 432242, 118733, F26B 1302

Patent

active

045451362

ABSTRACT:
A valve for isolating the interior of a glow discharge chamber from the atmosphere and other reactants. The valve includes a body mounted in an aperture of the chamber. A slit-like opening is provided therein to allow the interior of the chamber to communicate with interrelated elements of a deposition system. A source is provided for introducing inert gas into the opening under pressure somewhat greater than that of reaction gases and plasma within the chamber to create an effective, non-reactive gas curtain.

REFERENCES:
patent: 2887984 (1959-05-01), Drummond
patent: 2975753 (1961-03-01), Hayes
patent: 4268977 (1981-05-01), Geiger
patent: 4480585 (1984-11-01), Gattuso
patent: 4492181 (1985-01-01), Ovshinsky

Affiliated with

Also associated with

Rating

Isolation valve does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Isolation valve, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Isolation valve will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2212796