Isolation structures in semiconductor integrated circuits (IC)

Details Isolation structures in semiconductor integrated circuits (IC) Isolation structures in semiconductor integrated circuits (IC)

2006-03-14

2006-03-14

Owens, Douglas W (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C438S221000

Reexamination Certificate

active

07012316

ABSTRACT:
A novel isolation structure in semiconductor integrated circuits (IC) and the fabrication method of the same. The isolation structure comprises (a) semiconductor a substrate, and (b) an electric isolation region embedded in and at top of the semiconductor substrate, wherein the electric isolation region comprises (i) a bubble-implanted semiconductor region and (ii) an electrically insulating cap region on top of the bubble-implanted semiconductor region.

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