Isolation and protection system for preventing a source of ultra

Details Isolation and protection system for preventing a source of ultra Isolation and protection system for preventing a source of ultra

1998-08-17

1999-08-31

Ferensic, Denise L.

Fluid handling

Processes

137240, 137597, E03B 100

Patent

active

059440430

ABSTRACT:
A method and system for preventing a source of ultra-purified water from being contaminated with chemicals includes a source of ultra-purified water and a reservoir containing a chemical source. The reservoir has a chemical delivery valve and a chemical outlet pipe coupled to a chemical delivery line for supplying chemicals to a process chamber during a chemical delivery mode of operation. A first controllable inlet valve has its outlet coupled to the chemical delivery line and the source of ultra-purified water for supplying the ultra-purified water from the source of ultra-purified water to the process chamber during a flushing mode of operation. A second controllable inlet valve has an outlet coupled to the inlet of the first controllable inlet valve and an inlet coupled to the source of ultra-purified water. A source of gas under pressure is coupled between the outlet of the second controllable inlet valve and the inlet of said first controllable inlet valve for creating a virtual air gap. As a result, there is prevented the backflow of the chemical source from the reservoir into the source of ultra-purified water causing contamination thereof during the chemical delivery mode of operation.

REFERENCES:
patent: 4846212 (1989-07-01), Scobie et al.
patent: 4869301 (1989-09-01), Ohmi et al.
patent: 5398712 (1995-03-01), Wang et al.
patent: 5727589 (1998-03-01), Yokogi

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