Isolated sidewall capacitor with dual dielectric

Details Isolated sidewall capacitor with dual dielectric Isolated sidewall capacitor with dual dielectric

1995-12-22

1996-12-17

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361305, 361313, 361320, 3613215, 437919, 29 2542, H01G 406, H01G 4008, H01G 700

Patent

active

055859984

ABSTRACT:
An isolated sidewall capacitor with dual dielectric, which includes two capacitors. The first capacitor includes a first conductor on top of a substrate, a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein, a non-conductive sidewall spacer formed in the first opening, the non-conductive sidewall spacer having a second opening formed therein, and a second conductor formed in the second opening. The second capacitor includes the second conductor, a first non-conductor disposed over the top portion of the second conductor, a third conductor disposed over the first non-conductor, and the third conductor electrically connected to the first conductor. A second non-conductor isolates the first conductor from the second conductor.

REFERENCES:
patent: 4591738 (1986-05-01), Bialas, Jr. et al.
patent: 4954927 (1990-09-01), Park
patent: 5081559 (1992-01-01), Fazan et al.
patent: 5189503 (1993-02-01), Suguro et al.
patent: 5192704 (1993-03-01), McDavid et al.
patent: 5208725 (1993-05-01), Akcasu
patent: 5313089 (1994-05-01), Jones, Jr.
patent: 5335138 (1994-08-01), Sandhu et al.
patent: 5365096 (1994-11-01), Taniguchi
patent: 5366920 (1994-11-01), Yamamichi et al.
patent: 5371700 (1994-12-01), Hamada
patent: 5382817 (1995-01-01), Kashihara et al.
patent: 5383088 (1995-01-01), Chapple-Sokol et al.
patent: 5397748 (1995-03-01), Watanabe et al.
patent: 5405796 (1995-04-01), Jones, Jr.
patent: 5416042 (1995-05-01), Beach et al.
patent: 5436477 (1995-07-01), Hashizume et al.
patent: 5438011 (1995-08-01), Blalock et al.
patent: 5438012 (1995-08-01), Kamiyama
patent: 5442213 (1995-08-01), Okudaira et al.
D. E. Kotecki and K. L. Saenger, "Fabrication Process for Container and Crown Electrodes in Memory Devices", IBM Technical Disclosure Bulletin, vol. 38, No. 11, Nov. 1995, pp. 197-199.

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