Isolated sidewall capacitor having a compound plate electrode

Details Isolated sidewall capacitor having a compound plate electrode Isolated sidewall capacitor having a compound plate electrode

1995-12-22

1997-05-27

Ledynh, Bot L.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361305, 3613215, 361311, 257296, H01K 116

Patent

active

056337817

ABSTRACT:
A capacitor structure is provided, with a first conductor on top of a substrate having at least one layer of dielectric material thereon; a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein; a second conductor, in electrical contact with the first conductor, formed on the sidewalls of the first opening; a non-conductive sidewall spacer formed in the first opening and contacting the second conductor, the non-conductive sidewall spacer having a second opening formed therein; and a third conductor formed in the second opening.

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