Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1995-12-22
1999-06-22
Kincaid, Kristine
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361313, 361320, 3613215, 3613214, 29 2542, H01G 406, H01G 4008, H01G 4002
Patent
active
059148519
ABSTRACT:
A capacitor structure is provided, with a first conductor on top of a substrate, a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein, a non-conductive sidewall spacer formed in the first opening, the non-conductive sidewall spacer having a second opening formed therein, and a second conductor formed in the second opening.
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Comfort James H.
Grill Alfred
Kotecki David Edward
Saenger Katherine Lynn
Dinkins Anthony
Dougherty Anne
International Business Machines - Corporation
Kincaid Kristine
Mortinger Alison D.
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