Isolated photodiode array

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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148187, 357 49, H01L 2120

Patent

active

039560341

ABSTRACT:
Low impurity concentration planar anode regions are formed without a mask in a plurality of cathode regions which are isolated from each other on their lateral edge by an insulating barrier and connected to each other by a low resistivity polycrystalline body. Metal contacts to the anode regions and the common cathode polycrystalline body are coplanar.

REFERENCES:
patent: 3475661 (1969-10-01), Iwata et al.
patent: 3655439 (1972-04-01), Seiter
patent: 3716425 (1973-02-01), Davidsohn
patent: 3826699 (1974-07-01), Sawazaki et al.

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